NANO * 3200 – Nanolithographic Techniques W (3-3) [0.50]

Lithographic techniques applied at the micrometer and nanometer scale are key to the production of devices for the electronic and related industries. Projection and proximity techniques (XUV, electron, and ion beams) and writing processes (electron beam, ion beam, and scanned probe) will be explored. Emphasis will also be placed on soft lithographic techniques such as stamping and dip-pen nanolithography.

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