ENGG * 3570 – MEMS and Microfabrication F (3-2) [0.50]

This course presents a broad survey of micro-electro-mechanical systems (MEMS) and microfabrication technologies. It covers silicon and non-silicon microfabrication techniques for microsensors, microactuators, and nanotechnology. It introduces CAD tools and mechanical and electrical issues in designing devices such as micromotors, grippers, accelerometers, and pressure sensors. It discusses limitations and challenges in design and fabrication of MEMS and enables the application of general micromachining principles to developing novel devices. (First offering – Fall 2012)

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